Microtechnology/Microelectromechanical Systems (MEMS)

=Applications= =Resonators= =Strain Gauges= =Pressure Sensors= =AFM cantilevers= =Acceleration Detectors= =Optical Beam Control= =RF MEMS=
 * Microelectromechanical Systems (MEMS)
 * RF_MEMS

= Reliability design rules =

Sandia has published a set of "reliability design rules" for MEMS devices intended to avoid failure modes experienced in early MEMS device tests. The most common failure mechanism was wear of the rubbing surfaces.

=References=

See also notes on editing this book about how to add references Microtechnology/About.